基于PolySim电子级多晶硅还原炉三维数值模拟

利用Poly Sim软件建立了国内电子级多晶硅9对棒现役还原炉的三维模型,对还原炉内部的流动、传热进行了数值模拟,得到还原炉内部流场、温场以及硅棒表面温度的分布情况,指出硅棒桥接附近气体流速较小、气体温度及硅棒表面温度过高是该区域沉积不均匀的主要原因。和实际生产结果对比表明,模拟计算数据的误差不超过5%。

Three Dimensional Numerical Simulation of Electronic Grade Polysilicon Reduction Furnace Based on PolySim Software

The three-dimensional reactor model of chemical vapor deposition of polysilicon was established by PolySim software,and the flow and heat transfer inside the reactor were numerically simulated.The distribution of the internal flow field,temperature field and silicon rod in the reactor were obtained.Furthermore,it is pointed out that there are problems such as low gas flow rate,overheated gas temperature and overheated silicon rod surface temperature near the area above the reactor,especially near the silicon bridge.Compared with the actual production results,the error of the simulated data is not more than 5%.