| PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE |
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| 作者姓名： | 余自力 叶牧 卢丽珍 陈捷 |
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| 作者单位： | Changchun Institute of Applied Chemistry，Academia Sinica，Changchun，Changchun Institute of Applied Chemistry，Academia Sinica，Changchun，Changchun Institute of Applied Chemistry，Academia Sinica，Changchun，Changchun Institute of Applied Chemistry，Academia Sinica，Changchun |
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| 基金项目： | The project is supported by the National Natural Science Foundation of PRC |
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| 摘 要： | In a capacitively coupled RF discharge system with external electrodes ,hexamethyicyclotrisiloxane was polymerized, and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy, XPS measurement, PGC/MS combined technique, TG analysis and contact angle measuring. The results showed that the polymers prepared in H_2 or O_2 have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities.
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| 收稿时间： | 1987-08-10 |
PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE* |
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| YU Zili,YE Mu,LU Lizhen,CHEN Jie.PLASMA POLYMERIZATION OF HEXAMETHYLCYCLOTRISILOXANE[J].Chinese Journal of Polymer Science,1989,0(2):111-118. |
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| Authors: | YU Zili YE Mu LU Lizhen CHEN Jie |
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| Institution: | Changchun Institute of Applied Chemistry; Academia Sinica; Changchun |
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| Abstract: | In a capacitively coupled RF discharge system with external electrodes ,hexamethyicyclotrisiloxane was polymerized, and the effects of discharge power and plasma gas on polymer deposition rate were studied. The polymer structures and properties were studied by IR spectroscopy, XPS measurement, PGC/MS combined technique, TG analysis and contact angle measuring. The results showed that the polymers prepared in H_2 or O_2 have higher C/Si ratio in comparison with those prepared in inert gases. PGC/MS results revealed the existence of many short carbon chains in the polymer structure .TG analysis suggested that the polymers prepared in the inert gas would possess better thermal stabilities. |
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| Keywords: | Plasma Polymerization Hexamethylcyclotrisiloxane |
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