具有存储功能的衍射图像光刻系统的研制

研制了一种在衍射光变图像器件上进行信息存储的新型数字化激光光刻系统。采用空间光调制器作图形自动输入，双远心投影成像系统在光刻记录面上缩微图形。通过光栅干涉光学头对记录面上的微图形进行干涉调制，使微图形上产生干涉条纹，条纹空间频率范围为500-1200lp／mm。在光刻胶干版上的存储实验表明，在衍射光变图像上的单角度存储信息密度大于3．7Mbit／cm^2。改变干涉条纹取向、条纹间隔和需要存储的图形，光刻系统可实现信息的旋转复用存储。上述光刻系统将会在防伪和衍射光变图像器件制造领域有良好应用。

Fabrication of a Diffractive Image Lithographic System for Optical Storage

A novel digital laser lithographic system has been fabricated for storing optical information on the diffractive optical variable image device (DOVID). The digital input patterns on spatial light modulator (SLM) are imaged into the micro-images in the recording plane by a two tele-centric optical projection system with large reduction ratio. The micro-images are modulated by the interferential fringes with the spatial frequency range from 500～1200 lp/mm, which are generated by a grating interferential optical head in the lithographic system. The experimental results recorded on the photoresist plate show that the information storage density can be achieved over 3.7 Mbit/cm2 in one direction storage. The angle rotating multiplexing optical storage can be automatically realized by inputting multiple patterns needed to be stored, at the meantime, changing the direction and spatial frequency of interferential fringes. The optical storage lithographic system is useful in the fields of optical security and fabrication of diffraction optical variable image devices.