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Quasi-fractional Talbot effect of resonant diffraction grating
Authors:Yue Fang  Qiaofeng Tan  Mingqian Zhang  Guofan Jin
Institution:1. Group of Optics, Department of Applied Physics, University of Cantabria, 39005, Santander, Spain;2. Instituto de Estructura de la Materia (IEM), Consejo Superior de Investigaciones Científicas (CSIC), Serrano 121, 28006 Madrid, Spain;3. Technology Innovation Institute, Building B04C, Abu Dhabi P.O. Box 9639, United Arab Emirates;4. Centre of Excellence ENSEMBLE3 sp. z o.o., Wolczynska 133, Warsaw, 01-919, Poland
Abstract:The Fresnel diffraction of resonant diffraction grating is studied on the basis of the modal method, and it shows that the conventional fractional Talbot effect can still occur by choosing appropriate parameters. The Fresnel diffraction distributions of the resonant diffraction gratings with periods between λ and 4λ are analyzed, and the diffraction fields exhibit periodicity in both grating direction and the propagating direction. The experiment is carried out to verify the simulation results of the quasi-fractional Talbot effect of the resonant diffraction grating. This effect has potential application in lithography for high-resolution patterning.
Keywords:
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