Sputtering yields of nickel and chromium |
| |
| Authors: | G P Chen J von Seggern H Gnaser W O Hofer |
| |
| Institution: | (1) IGV, KFA-Jülich, D-5170 Jülich, Fed. Rep. Germany;(2) FB Physik, Universität, D-6750 Kaiserslautern, Fed. Rep. Germany;(3) Projekt Kernfusion, KFA-Jülich, D-5170, Fed. Rep. Germany;(4) Present address: Southeast University, Nanjing, P.R. China |
| |
| Abstract: | The sputtering yield of polycrystalline nickel and chromium was determined as a function of projectile energy (1–8 keV), projectile mass (N+, Ne+, Ar+, Xe+), angle of incidence (0°–75°), and oxygen partial pressure. Where theoretical values exist, the agreement is reasonable.EURATOM Association |
| |
| Keywords: | 79 20 – m |
| 本文献已被 SpringerLink 等数据库收录！ |
|
