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Study of perfection of layers of AlGaSb(AS) solid solution
Authors:V. P. Germogenov  O. M. Ivleva  Ya. I. Otman  L. E. Épiktetova
Affiliation:(1) V. D. Kuznetsov Siberian Physicotechnical Institute, Tomsk University, USSR
Abstract:Studies have been carried out on the perfection of then-AlxGa1–xSb1–yAsy (0.12lesxles0.26) layer grown on GaSb substrates under different conditions of lattice matching. During the relaxation of the mechanical stresses at first a system of tilt dislocations with a density of up to 5 · 105 cm–2 is formed while in thick layers (h sim 20 mgrm) a network of misfit dislocations parallel to the heteroboundary is formed. The time required to dissolve a weighed amount of GaAs in the melt is shown to be of major importance for obtaining layers of a solid solution that are isoperiodic with the substrate. The entry of arsenic only in the initial portion of the epitaxial layer can reduce the dislocation density in the layer without decreasing the measured value of Aa. Dissolution of a weighed amount of GaAs in a Ga + Sb melt for two hours at T=730–750°C is sufficient to obtain layers of AlxGa1–xSb1–yAsy solid solution that are isoperiodic with the substrate.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 1, pp. 84–89, January, 1988.In conclusion, we thank L. V. Druzhinina for useful discussions as well as Z. V. Korotchenko, L. S. Khludkova, and F. S. Kim for assistance in the performance of the experiments.
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