Contribution of activation analysis with low energy charged particles to studies on GaAs |
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| Authors: | M Valladon G Blondiaux C Koemmerer J Hallais G Poiblaud A Huber J L Debrun |
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| Institution: | (1) CNRS-Groupe “Application des Réactions Nucléaires à l'Analyse Chimique”, 3A, rue de la Férollerie, 45045 Orleans Cedex, (France);(2) LEP, 3, avenue Descartes, 94450 Limeil-Brevannes, (France);(3) La Radiotechnique Compelec, RTC, BP 6025, 14001 Caen, (France);(4) THOMSON CSF 91, Corbeville, (France) |
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| Abstract: | It is shown that the instrumental analysis of carbon and oxygen in GaAs, at trace level, can be achieved by irradiation with
low energy deuterons and tritons (3 MeV). The experimental sensitivities are 6 ppb/weight for the16O(
1
3
H,n)18F reaction and 25 ppb/weight for the12C(
1
2
H,n)13N reaction. Applications related to the metallurgy of GaAs are described. |
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