3D molecular imaging SIMS |
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Authors: | Greg Gillen Albert Fahey Matt Wagner Christine Mahoney |
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Affiliation: | Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, MD 20899-8371, USA |
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Abstract: | Thin monolayer and bilayer films of spin cast poly(methyl methacrylate) (PMMA), poly(2-hydroxyethyl methacrylate) (PHEMA), poly(lactic) acid (PLA) and PLA doped with several pharmaceuticals have been analyzed by dynamic SIMS using SF5+ polyatomic primary ion bombardment. Each of these systems exhibited minimal primary beam-induced degradation under cluster ion bombardment allowing molecular depth profiles to be obtained through the film. By combing secondary ion imaging with depth profiling, three-dimensional molecular image depth profiles have been obtained from these systems. In another approach, bevel cross-sections are cut in the samples with the SF5+ primary ion beam to produce a laterally magnified cross-section of the sample that does not contain the beam-induced damage that would be induced by conventional focussed ion beam (FIB) cross-sectioning. The bevel surface can then be examined using cluster SIMS imaging or other appropriate microanalysis technique. |
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Keywords: | Beam-induced damage Cluster bombardment Depth profile Secondary ion mass spectrometry |
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