Yields and ionization probabilities of sputtered Inn particles under atomic and polyatomic Aum ion bombardment |
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Authors: | AV Samartsev |
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Institution: | Physics Department, University of Duisburg-Essen, 47048 Duisburg, Germany |
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Abstract: | The emission of neutral and charged atoms and clusters from a polycrystalline indium surface under bombardment with 5 and 10 keV Au, Au2, Au3 and Au5 projectiles was investigated. Single photon laser postionization was utilized for the detection of sputtered neutral particles. Secondary ions were detected without the laser under otherwise exactly the same experimental conditions. The relative cluster yields were found to be enhanced under polyatomic projectile bombardment, more so the larger the number of atoms in the sputtered cluster. The ionization probability strongly increases with increasing cluster size, but is essentially independent of the projectile impact energy. At a fixed impact energy, the ionization probability of sputtered monomers was found to decrease with increasing number of constituent gold atoms per projectile, but there was no detectable effect for sputtered dimers and larger clusters. |
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Keywords: | ToF-SNMS Cluster emission Sputtering Ionization |
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