Characterizing SIMS transient effects apparent in matrix secondary ion signals from silicon under 1 keV Cs impact |
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Authors: | P.A.W. van der Heide |
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Affiliation: | Center for Materials Characterization (CMC), Chemistry Department, University of Houston, Houston, TX 77204-5003, USA |
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Abstract: | The low energy Si2−, Si3− and Si4− secondary ion signals resulting from Cs+ impact on Si appear to scale with the Cs uptake noted over the SIMS transient region in a manner consistent with the electron tunneling model. These populations, particularly Si3− and Si4− also exhibit a relative insensitivity to the presence of O (shown once sputter rate variations are accounted for). Profiles that more closely match the expected Si concentration gradient from a native oxide terminated Si wafer present within the SIMS transient region can also be obtained by simply dividing the Si3− or Si4− secondary ion intensities by the Si2− intensities. This suggests a possible alternative route for reducing transient effects present in the negative secondary ion populations from Si wafers. |
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Keywords: | Secondary ion emission Transient effects Silicon |
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