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Mechanism of titanium-nitride chemical mechanical polishing |
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| Authors: | Dao-Huan Feng Ruo-Bing Wang Ao-Xue Xu Fan Xu Wei-Lei Wang Wei-Li Liu Zhi-Tang Song |
| Affiliation: | (State Key Laboratory of Functional Materials for Informatics,Laboratory of Nanotechnology,Shanghai Institute of Micro-system and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of the Chinese Academy of Sciences,Beijing 100049,China) |
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