| Fabrication and characterization of Al–Mn superconducting films for applications in TES bolometers |
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| 作者单位： | 1.Department of Microelectronics and Nanoelectronics, Tsinghua University, Beijing 100084, China;2.Beijing National Research Center for Information Science and Technology, Beijing 100084, China;3.Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;4.Tsinghua University Future Chip Technology Advanced Innovation Center, Beijing 100084, China |
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| 基金项目： | Project supported by the National Natural Science Foundation of China (Grant Nos. 11653001 and 11653004). |
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| 摘 要： | Superconducting transition edge sensor(TES) bolometers require superconducting films to have controllable transition temperatures T_c in different practical applications.The value of T_c strongly affects thermal conductivity and thermal noise performance of TES detectors.Al films doped with Mn(Al-Mn) of different concentrations can accomplish tunable T_(c.)A magnetron sputtering machine is used to deposit the Al-Mn films in this study.Fabrication parameters including sputtering pressure and annealing process are studied and their influences on T_c and superconducting transition width ΔT_c are optimized.The Al-Mn films with ΔT_c below 1.0 mK for T_c in a range of 520 mK-580 mK are successfully fabricated.
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| 收稿时间： | 2020-11-11 |
Fabrication and characterization of Al-Mn superconducting films for applications in TES bolometers |
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| Affiliation: | 1.Department of Microelectronics and Nanoelectronics, Tsinghua University, Beijing 100084, China;2.Beijing National Research Center for Information Science and Technology, Beijing 100084, China;3.Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;4.Tsinghua University Future Chip Technology Advanced Innovation Center, Beijing 100084, China |
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| Abstract: | Superconducting transition edge sensor (TES) bolometers require superconducting films to have controllable transition temperatures Tc in different practical applications. The value of Tc strongly affects thermal conductivity and thermal noise performance of TES detectors. Al films doped with Mn (Al-Mn) of different concentrations can accomplish tunable Tc. A magnetron sputtering machine is used to deposit the Al-Mn films in this study. Fabrication parameters including sputtering pressure and annealing process are studied and their influences on Tc and superconducting transition width ΔTc are optimized. The Al-Mn films with Δ Tc below 1.0 mK for Tc in a range of 520 mK-580 mK are successfully fabricated. |
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| Keywords: | Al-Mn superconducting films deposition process annealing process superconducting transition edge sensor |
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