压阻式压力传感器灵敏度与线性度的仿真方法

灵敏度和线性度是压力传感器最重要的两个性能指标。为了制作出能够满足实际应用需求的压力传感器,必需探索出一种压力传感器灵敏度和线性度的有效仿真方法。提供了一种基于对压阻式压力传感器薄膜表面应力的有限元分析(FEA)和路径积分的仿真方法,从而实现了在满量程范围内不同压力值下对传感器电压输出值的精确估计,在此基础上对压力传感器的灵敏度和线性度进行了有效仿真。实验结果验证了该方法的精确性:传感器样品的灵敏度测试值为42.462～44.460 mV/MPa,与仿真值之间的相对误差控制在3.3%以下,同时得到非线性低于0.16%的良好线性度以满足应用需求。

Simulation Method for the Sensitivity and Linearity of Piezoresistive Pressure Sensors

Sensitivity and linearity are the two most important parameters for pressure sensors.In order to produce pressure sensors that can meet the need for certain applications,it is necessary to explore the effective methods to simulate the sensitivity and linearity of the pressure sensors.A simulation method based on the path integration and finite element analysis(FEA) of the stress on the diaphragm surface of the piezoresistive pressure sensor was provided to realize the accurate evaluation of output voltage values under different pressures within the full scale,on the basis of which the sensitivity and linearity of the sensor were effectively simulated.The test results confirm the accuracy of the method,the sensitivity values of the sensor samples range from 42.462 mV/MPa to 44.460 mV/MPa,the relative errors of which by the simulation are limited less than 3.3%.The excellent performance of the linearity with the nonlinearity under 0.16% is also obtained to satisfy the need for certain applications.