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| 基于ZnSe/Ag/ZnSe可见区透明导电薄膜 | |
| 引用本文： | 宋春燕,刘星元. 基于ZnSe/Ag/ZnSe可见区透明导电薄膜[J]. 光子学报, 2014, 40(6): 857-859. DOI: 10.3788/gzxb20114006.0857 |
| 作者姓名： | 宋春燕 刘星元 |
| 作者单位： | (1 中国科学院长春光学精密机械与物理研究所 激发态物理重点实验室,长春 130033) (2 中国科学院研究生院,北京 100049) |
| 基金项目： | 中国科学院知识创新工程项目（No.20060615A）和吉林省科技发展计划项目（No.20090346,No.20100570）资助 |
| 摘 要： | 利用红外光学材料ZnSe和金属Ag在室温下采用电子束蒸发镀膜技术研制了透明导电薄膜ZnSe/Ag/ZnSe,该薄膜的电子浓度为1.208×1020 cm－3,电子迁移率和电阻率分别为17.22 cm2 V－1 s－1和2.867×10－5 Ω·cm,功函数达到5.13 eV,在可见区的平均透过率理论模拟值超过80%,而测量结果为63.8%,测量的最高透过率为83%.结果表明,该透明导电薄膜具有良好的光学和电学性能,可作为透明电极应用于发光二极管等光电子器件中. |
| 关 键 词： | 透明导电薄膜 ZnSe Ag 功函数 |
| 收稿时间： | 2010-09-26 |
Transparent Conducting Film in Visible Region Based on ZnSe/Ag/ZnSe |
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| SONG Chun-yan,LIU Xing-yuan. Transparent Conducting Film in Visible Region Based on ZnSe/Ag/ZnSe[J]. Acta Photonica Sinica, 2014, 40(6): 857-859. DOI: 10.3788/gzxb20114006.0857 | |
| Authors: | SONG Chun-yan LIU Xing-yuan |
| Affiliation: | (1 Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China) (2 Graduate Uniersity of Chinese Academy of Sciences,Beijing 100049,China) |
| Abstract: | Under room temperature,ZnSe/Ag/ZnSe transparent conducting film was fabricated by electron beam evaporation based on infrared material ZnSe and metal Ag.The ZnSe/Ag/ZnSe film has the electron density of 1.208×1020 cm－3,the electron mobility of 17.22 cm2V－1s－1,the resistivity of 2.867×10－5 Ω·cm,and the work function is 5.13 eV.The ZnSe/Ag/ZnSe film shows an average visible transmittance of more than 80% by theoretical modeling and 63.8% by measurement.The maximum measured transmittance of 83% can be obtained.The results indicates that ZnSe/Ag/ZnSe film has good optical and electrical properties that can be used as transparent electrode in optoelectronic devices. |
| Keywords: | Transparent conducting film ZnSe Ag Work function |
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