基于KH560修饰的有机/无机杂化材料电光波导制备

利用溶胶-凝胶法制备了硅烷偶联剂KH560修饰的有机/无机杂化电光材料,分析了KH560的水解缩合的反应机理.对制备好的电光薄膜进行了表面形貌、折射率和电光特性的表征,并用反射法测量得出了该材料的电光系数为3.5pm/V.针对这种材料柔韧的特性,设计了上加载条形电光波导,并利用Opti-BPM软件模拟了二维和三维光场.摸索了其制备的加工工艺,制备了该结构的光波导,最后得到了这种波导的近场输出.

Preparation of Electro-Optic Waveguide Based on KH560 Modified Organic/Inorganic Hybrid Materials

A kind of silane coupling agent KH560-based organic / inorganic hybrid electro-optic (E-O) material was synthesized by Sol-Gel method.The reaction mechanism of hydrolysis and condensation of KH560 in the case of hydrochloric acid as a catalyst was analysed.Then the surface morphology,refractive index and E-O properties of the thin films were characterized by means of atomic force microscopy (AFM),ellipsometry,and simple reflection method.At last,the poled polymer films with good shape and alterable refractive index were obtained.The E-O coefficient was measured to be 3.5 pm/V @1 310 nm wavelengh based on the simple reflection method.According to the flexibility of this material,the structure of the strip-loaded waveguide was designed.And the two-dimensional and three-dimensional light fields were also simulated by the Opti-BPM software.After exploring the processing technology,the fabrication of the waveguide with strip-loaded structure was completed.Finally the near-field images of this waveguide were obtained.