沉积时间对球状微米金刚石聚晶结构的生长及其场发射特性影响

利用微波等离子体化学气相沉积法,在覆盖金属钛层的陶瓷衬底上,通过改变沉积时间制备出不同结构的类球状微米金刚石聚晶碳膜.通过扫描电子显微镜、喇曼光谱、X射线衍射谱对碳膜进行了分析测试,并研究了不同沉积时间下沉积的类球状微米金刚石聚晶薄膜的场致电子发射特性.结果显示:不同的沉积时间所制备的碳膜形貌有很大变化,场致电子发射的效果也有很大不同,从而得出了场增强因子的降低和导电通道的增长是场发射效果变差的主要原因.

Growth and Field Emission Properties of Globe-like Diamond Microcrystalline-aggregate

The globe-like diamond microcrystalline aggregates were grown in the different growing time by microwave plasma chemical vapor deposition method on the ceramic substrate with a Ti metal layer.The carbon films were evaluated by Raman scattering spectroscopy,X-ray diffraction spectrum,and scanning electron microscopy.The field emission properties were tested by using a diode structure in a vacuum.The growth mechanism of the carbon films and field emission properties of the globe-like diamond microcrystalline aggregates were discussed.It was found that different carbon films prepared by deposition time greatly changes in morphology,and field emission results also change a lot.The decrease of field enhancement factor and the growth of conductive channel are the main reasons for deterioration of the field emission effect.