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| 溶胶-凝胶法Er2O3薄膜的结构和光学特性 | |
| 引用本文： | 王兴军 董斌 周治平. 溶胶-凝胶法Er2O3薄膜的结构和光学特性[J]. 光子学报, 2014, 39(7): 1213-1215. DOI: 10.3788/gzxb20103907.1213 |
| 作者姓名： | 王兴军 董斌 周治平 |
| 作者单位： | （1 北京大学 区域光纤通信网与新型光通信系统国家重点实验室,北京 100871） （2 大连民族学院 理学院 光电子技术研究所,辽宁 大连 116600） |
| 基金项目： | 国家自然科学基金（60907024、60977018）资助 |
| 摘 要： | 针对稀土Er掺杂Si光源中Er离子掺杂浓度低的问题,采用溶胶-凝胶（Sol-gel）法在Si(100)和SiO2/Si(100)基片上旋涂法制备Er2O3光学薄膜,Er离子浓度与以前掺杂方法相比提高了2个数量级.900 ℃热处理获得单一立方结构的Er2O3薄膜材料.光致发光（PL）特性研究表明在654 nm波长的激光泵浦下,Er2O3薄膜材料获得了1.535 μm的发光峰,并具有较小的温度猝灭1/5.在SiO2/Si(100)基体上制备的Er2O3薄膜材料的光致发光强度比Si(100)基体上制备的薄膜提高2-3倍.研究结果表明具有强光致发光特性的Er2O3薄膜是一种有前景的硅基光源和放大器材料. |
| 关 键 词： | 发光学 光学薄膜 溶胶-凝胶法 氧化铒 |
| 收稿时间： | 2009-10-15 |
Structural and Photoluminescence Properties of Er2O3 Films by Sol-Gel Method |
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| WANG Xin-Jun,DONG Bin,ZHOU Zhi-Ping. Structural and Photoluminescence Properties of Er2O3 Films by Sol-Gel Method[J]. Acta Photonica Sinica, 2014, 39(7): 1213-1215. DOI: 10.3788/gzxb20103907.1213 | |
| Authors: | WANG Xin-Jun DONG Bin ZHOU Zhi-Ping |
| Affiliation: | (1 State Key Laboratory of Advanced Optical Communications System and Networks, Peking University, Beijing 100871, China) (2 School of Science, Dalian Nationalities University, Dalian, Liaoning 116600, China) |
| Abstract: | In order to resolve the low Er3+ concentration problem in Er3+ doped Si based light source, the Er2O3 films with high Er3+ concentration and strong 1.535 μm room photoluminescence are fabricated at 900 ℃ on Si(100) and SiO2/Si(100) substrates, respectively, by using the sol-gel spin coating method. Small thermal quenching of 1/5 is observed. PL intensity increases 2~3 times on SiO2/Si substrate compared with that on Si substrate. Er2O3 structure is single cubic. The Er2O3 films with strong PL intensity are promising candidates for application in Si-based light source and amplifier. |
| Keywords: | Luminescence Optical films Sol-gel method Er2O3 |
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