Realization of Fabry-Perot resonators for hard X rays using micro- and nanotechnology

An X-ray Fabry-Perot resonator has been proposed and investigated for more than three decades. The difficulty in realizing such a resonator is mainly due to the strict requirement on coherence for cavity resonance, which is governed by the energy resolution of the incident X-ray photons and the size of the resonator. With the aid of modern micro-and nanotechnology for silicon, such as X-ray lithography, miniature resonators, approximately a few micrometers or smaller, can be prepared. Together with X-ray photons of ultrahigh-energy resolution from synchrotron sources, the required conditions on coherence for cavity resonance are fulfilled. Several X-ray cavities prepared by this means are used in X-ray back-diffraction experiments, where back diffraction acts as mirror reflection for X rays. Resonance interference fringes are observed unambiguously. Attempts to use multilayered materials for cavity fabrication are discussed in relation to X-ray synchrotron experiment. Possible future applications of this X-ray resonator are also mentioned. Published in Russian in Kristallografiya, 2007, Vol. 52, No. 1, pp. 27–31. Dedicated to the 50th Anniversary of the Journal The text was submitted by the author in English.