| 超短脉冲激光诱导周期性表面结构 |
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| 引用本文： | 李晨,STOIAN Razvan,程光华. 超短脉冲激光诱导周期性表面结构[J]. 中国光学, 2018, 11(1): 1-17. DOI: 10.3788/CO.20181101.0001 |
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| 作者姓名： | 李晨 STOIAN Razvan 程光华 |
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| 作者单位： | 1. 法国里昂大学 让莫内大学 法国国家科学研究中心休伯特居里实验室, 法国 圣埃蒂安市 42000;2. 中国科学院 西安光学精密机械研究所 瞬态光学与光子技术国家重点实验室, 陕西 西安 710119;3. 陕西科技大学 机电工程学院, 陕西 西安 710012 |
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| 基金项目： | 国家自然科学基金项目（No.61378019，No.61223007，No.61705124） |
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| 摘 要： | 激光诱导周期性表面结构（Laser-induced periodic surface structures，LIPSS）具有纳米尺度的特征结构和自重复的微观尺度的排列图案，因此，LIPSS在传感器、太阳能发电、光催化等方面具有广泛的应用前景。本文首先介绍LIPSS形成过程中超快激光与物质相互作用的复杂过程，强调瞬态光学性质和表面结构变化的作用。然后综述几种具有代表性的LIPSS形成机理，并且讨论了各自的优缺点。接着介绍了LIPSS形成过程中材料的变化，主要包括材料化学成分、晶体结构和表面微观结构的变化。最后综述了LIPSS在材料表面处理、光学和机械等方面的应用。
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| 关 键 词： | 超快光学 飞秒激光 微加工 周期性表面结构 |
| 收稿时间： | 2017-10-11 |
Laser-induced periodic surface structures with ultrashort laser pulse |
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| LI Chen,STOIAN Razvan,CHENG Guang-hua. Laser-induced periodic surface structures with ultrashort laser pulse[J]. Chinese Optics, 2018, 11(1): 1-17. DOI: 10.3788/CO.20181101.0001 |
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| Authors: | LI Chen STOIAN Razvan CHENG Guang-hua |
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| Affiliation: | 1. Laboratoire Hubert Curien, UMR 5516 CNRS, Universit éde Lyon, Universit éJean Monnet, 42000 Saint Etienne, France;2. State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, CAS, Xi'an 710119, China;3. College of Mechanical and Electrical Engineering, Shaanxi University of Science and Technology, Xi'an 710012, China |
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| Abstract: | Laser-induced periodic surface structures(LIPSS) have a wide application prospect from sensing to solar power generation and photocatalysis mainly due to its nanoscale features and self-repetitive microscopic patterns. In this review we discuss various complex process of the interaction of ultrafast laser with matter during the formation of LIPSS, emphasizing the role of transient optical properties and surface structural changes. Then several representative LIPSS formation mechanisms are summarized and their respective advantages and disadvantages are discussed. Next, the change of materials during the formation of LIPSS is introduced, including the change of chemical composition, crystal structure and surface microstructure. Finally, the application of LIPSS in material surface treatment, optics and mechanics is reviewed. |
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| Keywords: | ultrafast optics femtosecond laser micromachining periodic surface structures |
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