EPMA Present and Future |
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Authors: | Glyn Love |
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Institution: | (1) Centre for Electron Optical Studies, University of Bath, Bath BA2 7AY, UK, GB |
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Abstract: | In electron probe microanalysis the objective has always been to gain the maximum information from a sample. To this end
efforts have been directed at increasing detection efficiency, reducing the size of the excitation volume, analysing more
difficult specimens and improving the accuracy of quantitative measurements whilst, at the same time, attempting to minimise
the complexity of the analysis. The present paper comments on the progress that has been made in these areas, focuses on the
latest hardware and software developments taking place and looks forward to how these may impact on the technique of EPMA. |
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Keywords: | : X-ray spectrometers X-ray detectors surfaces and coatings standardless analysis expert systems |
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