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EPMA Present and Future
Authors:Glyn Love
Institution:(1) Centre for Electron Optical Studies, University of Bath, Bath BA2 7AY, UK, GB
Abstract: In electron probe microanalysis the objective has always been to gain the maximum information from a sample. To this end efforts have been directed at increasing detection efficiency, reducing the size of the excitation volume, analysing more difficult specimens and improving the accuracy of quantitative measurements whilst, at the same time, attempting to minimise the complexity of the analysis. The present paper comments on the progress that has been made in these areas, focuses on the latest hardware and software developments taking place and looks forward to how these may impact on the technique of EPMA.
Keywords::   X-ray spectrometers  X-ray detectors  surfaces and coatings  standardless analysis  expert systems  
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