|
|||||
|
|
Diamond-DLC double layer used in corrosive protective coating |
|
| Authors: | HK Csorbai G Kovách P Csíkvári A Sólyom E Kálmán |
| Institution: | a Chemical Research Center of the Hungarian Academy of Sciences, P.O. Box 17, H-1525 Budapest, Hungary b Technical University of Budapest, Department of Atomic Physics, P.O. Box 91, H-1521 Budapest, Hungary c Hungarian Academy of Sciences, Research Institute for Technical Physics and Materials Sciences, P.O. Box 49, H-1525 Budapest, Hungary |
| Abstract: | Pinhole-free diamond layers can widely be used in sensor technology as resistive coating against electrolyte solutions. The diamond layers created with chemical vapour deposition technique (CVD) are pinhole-free only above a certain thickness (at least 2.4 μm). Such layer thicknesses reduce the application possibilities. On the other hand, thin (∼200 nm) diamond like carbon (DLC) layers deposited by pulsed laser deposition technique (PLD) are pinhole free but have adhesion or contiguity problems depending on layer thickness. Utilizing the advantages of these two techniques a combined method was developed in order to prepare a pinhole free thin diamond-DLC double layer, for corrosion protection coating. The effects of various deposition parameters (such as background gas, temperature, bias, layer thickness) on the protective properties of the layers have been studied. |
| Keywords: | Diamond Corrosion DLC Pinhole Protective layer |
| 本文献已被 ScienceDirect 等数据库收录！ | |