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Single- and multi-pulse formation of surface structures under static femtosecond irradiation
Authors:M. Guillermin  F. Garrelie  N. Sanner  E. Audouard  H. Soder
Affiliation:a Laboratoire Traitement du Signal et Instrumentation (L.T.S.I.) UMR CNRS 5516, 18 Rue Benoît Lauras - Batiment F, 42000 Saint-Etienne, France
b Impulsion SAS, 12 rue Barrouin, 42000 Saint-Etienne, France
Abstract:Femtosecond surface structure modifications are investigated under irradiation with laser pulses of 150 fs at 800 nm, on copper and silicon. We report sub-wavelength periodic structures formation (ripples) with a periodicity of 500 nm for both materials. These ripples are perpendicular to the laser polarization and can be obtained with only one pulse. The formation of these ripples corresponds to a fluence threshold of 1 J/cm2 for copper and 0.15 J/cm2 for silicon. We find several morphologies when more pulses are applied: larger ripples parallel to the polarization are formed with a periodicity of 1 μm and degenerate into a worm-like morphology with a higher number of pulses. In addition, walls of deep holes also show sub-wavelength and large ripples.
Keywords:Ripples   Morphology   Laser
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