The structure and tribological behaviors of CrN and Cr-Ti-N coatings |
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Authors: | GA Zhang PX Yan YM Chen |
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Institution: | a Institute for Plasma and Metal Materials, Lanzhou University, Lanzhou 73000, China b State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
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Abstract: | The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures. |
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Keywords: | Magnetron sputtering Cr-Ti-N coatings Structure Tribological properties |
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