Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching |
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Authors: | Hartung Holger Kley Ernst-Berhard Tünnermann Andreas Gischkat Thomas Schrempel Frank Wesch Werner |
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Institution: | Institute of Applied Physics, Friedrich-Schiller-University Jena, Jena, Germany. hartung@iap.uni-jena.de |
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Abstract: | We present results on the fabrication and characterization of ridge waveguides in zinc-substituted lithium niobate. High-quality waveguides were fabricated by a combination of liquid-phase epitaxy and multiple applications of ion-beam enhanced etching. The two major demands on ridge waveguides, a very low side-wall roughness and a rectangle shape with side-wall angles close to 90 degrees , were realized simultaneously by using this technique. Single-mode waveguiding at a wavelength of 1064 nm was demonstrated with attenuation values of 0.9 dB/cm. |
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