| 基于衍射光谱的孔径平面结构测量研究 |
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| 引用本文： | 韩采芹.基于衍射光谱的孔径平面结构测量研究[J].光谱实验室,2011,28(1):175-178. |
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| 作者姓名： | 韩采芹 |
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| 作者单位： | 四川理工学院机械工程学院; |
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| 基金项目： | 人工智能(高校)重点实验室科研基金(2009R2003) |
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| 摘 要： | 提出衍射光谱的一种新应用,通过直接测量宽频带光源在远场一空间位置处的衍射光谱,获得孔径阵列平面的结构信息,这种方法能适用于任何一种不同标准和尺寸的孔径阵列平面结构的测量.
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| 关 键 词： | 衍射光谱 孔径阵列 傅里叶变换 远场 |
Research for Structure Measurement of Aperture Plane Based on Diffraction Spectrum |
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| HAN Cai-Qin.Research for Structure Measurement of Aperture Plane Based on Diffraction Spectrum[J].Chinese Journal of Spectroscopy Laboratory,2011,28(1):175-178. |
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| Authors: | HAN Cai-Qin |
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| Institution: | HAN Cai-Qin(School of Mechanical Engineering,Sichuan University of Science and Engineering,Zigong,Sichuan 643000,P.R.China) |
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| Abstract: | A new application of diffraction spectrum was proposed.The structure information for a periodic pattern can be obtained by measuring the diffraction spectrum of a broad-band light source at one spatial position in the far field.This scheme can be applied to any periodic structure at different scales or dimensions. |
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| Keywords: | Diffraction Spectrum Array Aperture Fourier Transform Far Field |
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