| Abstract: | Grazing‐incidence small‐angle X‐ray scattering (GISAXS) measurements with soft X‐rays have been applied to Ge nanodots capped with a Si layer. Spatially anisotropic distribution of nanodots resulted in strongly asymmetric GISAXS patterns in the qy direction in the soft X‐ray region, which have not been observed with conventional hard X‐rays. However, such apparent differences were explained by performing a GISAXS intensity calculation on the Ewald sphere, i.e. taking the curvature of Ewald sphere into account. |
