Beamline BL‐07 at Indus‐2: a facility for microfabrication research |
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| Authors: | V P Dhamgaye G S Lodha B Gowri Sankar C Kant |
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| Institution: | 1. Indus Synchrotrons Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indus‐2, Indore, MP 2. 452012, India |
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| Abstract: | The X‐ray lithography beamline on Indus‐2 is now operational, with two modes of operation. With a pair of X‐ray mirrors it is possible to tune the energy spectrum between 1 and 20 keV with a controlled spectral bandwidth. In its `no optics' mode, hard X‐rays up to 40 keV are available. Features and performance of the beamline are presented along with some example structures. Structures fabricated include honeycomb structures in PMMA using a stainless steel stencil mask and a compound refractive X‐ray lens using a polyimide–gold mask in SU‐8. |
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| Keywords: | X‐ray lithography beamlines high‐aspect‐ratio structures resist |
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