| Abstract: | The design, construction and commissioning of a beamline and spectrometer for inelastic soft X‐ray scattering at high resolution in a highly efficient system are presented. Based on the energy‐compensation principle of grating dispersion, the design of the monochromator–spectrometer system greatly enhances the efficiency of measurement of inelastic soft X‐rays scattering. Comprising two bendable gratings, the set‐up effectively diminishes the defocus and coma aberrations. At commissioning, this system showed results of spin‐flip, d–d and charge‐transfer excitations of NiO. These results are consistent with published results but exhibit improved spectral resolution and increased efficiency of measurement. The best energy resolution of the set‐up in terms of full width at half‐maximum is 108 meV at an incident photon energy tuned about the Ni L3‐edge. |
