Retrieval of the atomic displacements in the crystal from the coherent X‐ray diffraction pattern

The retrieval of spatially resolved atomic displacements is investigated via the phases of the direct(real)‐space image reconstructed from the strained crystal's coherent X‐ray diffraction pattern. It is demonstrated that limiting the spatial variation of the first‐ and second‐order spatial displacement derivatives improves convergence of the iterative phase‐retrieval algorithm for displacements reconstructions to the true solution. This approach is exploited to retrieve the displacement in a periodic array of silicon lines isolated by silicon dioxide filled trenches.