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Estimate of foil thickness by stereomicroscopy technique
Authors:A Dlouhý  J Pe?i?ka
Institution:(1) Institute of Physical Metallurgy, Czechosl. Acad. Sci., ZcaroniZcaronkova 22, 616 22 Brno, Czechoslovakia;(2) Present address: Faculty of Mathematics and Physics, Charles University, Prague, Ke Karlovu 5, 121 16 Praha 2, Czechoslovakia
Abstract:The determination of foil thickness by stereomicroscopy technique is discussed. The calculation of the foil thickness is performed in a general position of the foil in an electron microscope for a general choice of the marker position. In this case the crystallographic orientation of the foil normal has to be known. But there exists a special case (markers lie in the diffraction plane) where it is not necessary to know the orientation of the foil normal. The relative error in determining the foil thickness is about 10%.List of symbols B direction in the foil parallel with the primary beam in the first micrograph - d vector describing a common straight line ofdelta andgamma 1 (delta cap gamma 1) - F direction in the foil parallel with the primary beam in the second micrograph - g diffraction vector - M magnification - n foil normal - o vector defined byn ×B - p 1 first coordinate ofX in the first micrograph - p 2 first coordinate ofX in the second micrograph - p 1i ,P 2i quantitiesP 1,P 2 corresponding to thei-th markers on the top surface - t B foil thickness measured in theB direction - 
$$\hat t_B$$
auxiliary quantity - 
$$\hat t_{Bi}$$

$$\hat t_B$$
corresponding to thei-th markers on the top surface - t d foil thickness measured in thed direction - t F foil thickness in general - t n foil thickness measured in then direction - X 1 point inlambda B characterizing one of the markers - X 2 point inlambda T characterizing one of the markers - X 2i X 2 corresponding to thei-th markers on the top surface - X g magnitude ofX g - X gi magnitude ofX gi - X Gamma magnitude ofX Gamma - X vector connecting pointX 1 withX 2 (X equivX 2X 1 - X g component ofX perpendicular to the planegamma 1 - X gi X gi corresponding to thei-th markers on the top surface - X Gamma component ofX lying in the planegamma 1 - z distance betweengamma 1 caplambda T and the end point ofX Gamma divided by cosagr Greek symbols agr angle betweengamma 1 capNgr andgamma 1 caplambda B - Bgr angle betweeng anddelta caplambda T - gamma 1,gamma 2 reflection planes - delta plane containingn andg - deltam measure error - deltap difference betweenp 2 andp 1 (deltap=p 2p 1) - deltaP accuracy of length measurement - (deltat B )max maximum error oft B - 
$$(\Delta \hat t_B )_{\max }$$
maximum error of 
$$\hat t_B$$
- deltadelta accuracy of angle measurement - eegr angle characterizing the deviation from the foil position when symmetrical tilting is achieved - theta angle of tilt betweenB andF (between stereomicrographs) - lambda T plane describing approximately the top surface of the foil - lambda b plane describing approximately the bottom surface of the foil - Ngr screen plane - xgr angle betweengamma 1capNgr andX Gamma - pgr plane containingn andB - phiv angle of tilting from starting (after inserting the foil into the microscope) to working position (position during image observation) Special symbol cap intersection of two planes (common straight line)
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