三维电子散斑干涉技术及其应用研究

通过大错位剪切镜和一作为参考物的压电陶瓷相移器将三个电子散斑干涉系统组成一新的三维电子散斑干涉系统。利用该系统，结合相移技术和图像处理技术，可得到独立的位移场(u,v和w场)。该技术的特点是用三个激光器作为光源，一个压电陶瓷相移器产生参考光并实现相移，CCD摄像机前放置大错位剪切镜以使物光和参考光产生干涉。将该技术应用到柴油发动机零部件测量上，得到了主轴承孔周的三维位移场。

Study on Three-Dimensional ESPI and Its Application

A new three dimensional electronic speckle pattern interferometry (ESPI) system is constructed by three ESPIs through a large shearing device and a PZT phase shifter used as reference. Independent dispelacement fields (i.e. field u, v and w) can be obtained through the system with phase shifting technique and image processing. This new technique includes three lasers as light source, a PZT phase shifter which can push reference plane to change optical path of reference light. A large shearing Wollaston prism is placed in front of CCD camera to make interference between object wave and reference wave. This system is used in measuring parts of diesel engine. Three dimensional displacement fields around the hole of the main axle are obtained.