| Abstract: | A 3-dB paired interference (PI) optical coupler in silicon-on-insulator (SOI) based on rib waveguides with trapezoidal cross section was designed with simulation by a modified finite-difference beam propagation method (FD-BPM) and fabricated by potassium hydroxide (KOH) anisotropic chemical wet etching. Theoretically, tolerances of width, length,and port distance are more than 1, 100, and 1 μm, respectively.Smooth interface was obtained with the propagation loss of 1.1 dB/crn at the wavelength of 1.55μm. The coupler has a good uniformity of 0.2 dB and low excess loss of less than 2 dB. |
