Synthesis of Nanocrystalline Zr3N4 and Hf3N4 Powders from Metal Dialkylamides

A simple process to synthesize Zr₃N₄ and nitrogen‐rich Hf₃N₄ powders via ammonolysis of metal dialkylamides, i.e. Zr(NEt₂)₄ and Hf(NEt₂)₄, at temperatures below 700 °C is presented. The obtained nitrides have a rhombohedrally distorted NaCl‐type structure, which has previously been reported only for nitrogen‐rich films of these nitrides. Regardless of the atmosphere (N₂ and He), the Zr₃N₄ starts to decompose above about ～ 650 °C and achieves the highest decomposition rate at about 900 °C, finally yielding the mononitride ZrN. Both Zr₃N₄ and Hf₃N₄ powders are nanocrystalline with the crystal size of about 2 nm.