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Statistical approach to bulk inclusion initialized damage in films
Authors:Zhilin Xia  Zhengxiu Fan
Institution:a Shanghai Institution of Optics and Fine Mechanics, QingHe Road 390#, Shanghai 201800, China
b Graduate School, Chinese Academy of Sciences, Beijing 100080, China
Abstract:In experiments, we have found an abnormal relationship between probability of laser induced damage and number density of surface inclusion. From results of X-ray diffraction (XRD) and laser induced damage, we have drawn a conclusion that bulk inclusion plays a key role in damage process. Combining thermo-mechanical damage process and statistics of inclusion density distribution, we have deduced an equation which reflects the relationship between probability of laser induced damage, number density of inclusion, power density of laser pulse, and thickness of films. This model reveals that relationship between critical sizes of the dangerous inclusions (dangerous inclusions refer to the inclusions which can initialize film damage), embedded depth of inclusions, thermal diffusion length and tensile strength of films. This model develops the former work which is the statistics about surface inclusion.
Keywords:Damage  Laser  Inclusion  Film
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