MEMS profilometry by low coherence phase shifting interferometry: Effect of the light spectrum for high precision measurements |
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| Authors: | S Jorez J-P Raskin |
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| Institution: | a Université catholique de Louvain, Physics Department, Applied Optics Laboratory, Chemin du Cyclotron, 2, B-1348 Louvain-la-Neuve, Belgium
b Université catholique de Louvain, Research Center in Micro and Nanoscopic Materials and Electronic Devices (CeRMiN), Place du Levant, 3, B-1348 Louvain-la-Neuve, Belgium |
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| Abstract: | A white light interferometer can be used to measure profiles of a few nanometers and is therefore particularly well adapted for micro electro mechanical systems characterization. We present theoretical and experimental results on the profile precision as a function of the light source spectrum. We demonstrate that even if a broadband source is used in the phase shifting mode, the knowledge of the light spectrum allows to calculate a correction factor. This factor determines the local effective wavelength and can be used in order to increase the measurement precision of sample profiles. |
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