Flat-top profile of an excimer-laser beam generated using beam-splitter gratings |
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| Authors: | T Kajava A Hakola J Simonen J Turunen |
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| Institution: | a Department of Engineering Physics and Mathematics, Helsinki University of Technology, P.O. Box 2200, FI-02015 TKK, Finland
b University of Joensuu, Department of Physics, P.O. Box 111, FI-80101 Joensuu, Finland |
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| Abstract: | We present a simple solution to the beam-shaping problem in which a wide, typically rectangular spatial distribution of an excimer-laser beam should be transformed into a flat-top distribution, a few millimeters wide in both directions. The set-up can be made practically lossless and it allows the energy density of the pulse to be increased by a factor of 50. The method finds use, e.g., in pulsed laser deposition, UV lithography and micro machining. |
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| Keywords: | 42 60 Jf 42 79 Dj 42 55 Lt |
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