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Growth of diamond thin film on tool materials from a gas phase
Authors:Jin Zengsun  Lu Xianyi  Huang Fuping  Zou Guangtian
Institution:Institute of Atomic and Molecular Physics, Jilin University , Changchun, Jilin, 130023, China
Abstract:Abstract

In the present paper, diamond films have been synthesized on tungsten carbide, sintered diamond and high pressure diamond by hot filament chemical vapour deposition method from the mixture gas of methane and hydrogen, and growth features of diamond were studied.
Keywords:diamond thin film  hot filament chemical vapour deposition
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