Growth of diamond thin film on tool materials from a gas phase |
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Authors: | Jin Zengsun Lu Xianyi Huang Fuping Zou Guangtian |
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Institution: | Institute of Atomic and Molecular Physics, Jilin University , Changchun, Jilin, 130023, China |
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Abstract: | Abstract In the present paper, diamond films have been synthesized on tungsten carbide, sintered diamond and high pressure diamond by hot filament chemical vapour deposition method from the mixture gas of methane and hydrogen, and growth features of diamond were studied. |
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Keywords: | diamond thin film hot filament chemical vapour deposition |
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