Reactive sputtering TiO2 films for surface coating of poly(dimethylsiloxane) |
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Authors: | Zhiqiang Niu Xiaoyu Jia Weiping Zhang Wenyuan Chen KaiYou Qian |
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Affiliation: | Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiao Tong University, Key Laboratory for Thin Film and Micro Fabrication Technology of Ministry of Education, Shanghai 200030, PR China |
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Abstract: | Titanium dioxide (TiO2) films were prepared on poly(dimethylsiloxane) (PDMS) substrate by direct current (DC) reactive sputtering to change surface physical properties of PDMS. The effects of the changes were investigated by using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) analysis, water contact angle measurements and protein adsorption tests. Improved wettability and reduced adsorption properties were observed on PDMS surface coated TiO2 films. |
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Keywords: | PDMS TiO2 films Reactive sputtering Surface coating XPS Contact angle Protein adsorption |
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