| 被动半刚性磨盘在平滑中频误差中的应用 |
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| 引用本文： | 汉语,伍凡,万勇建,房凯.被动半刚性磨盘在平滑中频误差中的应用[J].强激光与粒子束,2010,22(2). |
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| 作者姓名： | 汉语 伍凡 万勇建 房凯 |
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| 作者单位： | 1．中国科学院 光电技术研究所，成都 610209; 2．中国科学院 研究生院， 北京100039 |
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| 基金项目： | 国家自然科学基金项目 |
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| 摘 要： | 介绍了一种去除中频误差的有效工具被动半刚性磨盘。被动半刚性磨盘由刚性基底、变形层、薄板层以及抛光层组成。这种特殊的夹层式结构使磨盘在平滑过程中具有高通滤波特性,因而能够有效去除中频误差。基于弹性力学和滤波器理论,分析了被动半钢性磨盘的平滑机理,讨论了磨盘基本参数和误差频率之间的相互关系。以一块表面具有明显中频误差的抛物面镜为实验件,对被动半刚性磨盘的平滑能力进行验证,经过2个周期(共计75 min)的平滑后,中频误差得到了有效抑制。
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| 关 键 词： | 光学加工 被动半刚性磨盘 应力分析 中频误差 非球面 |
| 收稿时间： | 1900-01-01; |
Research on mid-frequency errors smoothing with a passive semi-rigid lap |
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| HanYu,WuFan,WanYongJian,FangKai.Research on mid-frequency errors smoothing with a passive semi-rigid lap[J].High Power Laser and Particle Beams,2010,22(2). |
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| Authors: | HanYu WuFan WanYongJian FangKai |
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| Institution: | 1． Institute of Optics and Electronics, Chinese Academy of Sciences, P. O. Box 350, Chengdu 610209, China;2． Graduate University of Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | Mast aspheric optical elements fabricated using computer controlled optical surfacing(CCOS) technology have mid-frequency errors on their surfaces.These errors come about because of the small tools removal characteristic and the misfit between rigid tools and aspheric surface.A passive semi-rigid tool,which can smooth ripple errors efficiently,is introduced in this paper.The tool is composed of a rigid layer,a compliant layer and a polishing layer.The passive tool works like a high-pass filter,smoothing the... |
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| Keywords: | optical fabrication passive semi-rigid lap strain analysis mid-frequency errors aspheric optics |
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