Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces |
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Authors: | B K A Ngoi K Venkatakrishnan N R Sivakumar T Bo |
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Institution: | Precision Engineering Strategic Research Group, School of MPE, Nanyang Technological University, Nanyang Avenue, Singapore 639798, Singapore |
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Abstract: | Phase shifting interferometry is a well-established technique for non-contact surface profile measurement. Though phase shifting technique has many advantages, it is marred by a few inaccuracies due to the vibration and mechanical movement of the phase shifter itself. Significant amount of work is reported to theoretically compensate these error sources. But for a few works, prominent achievements have not been reported in eliminating these error sources in phase shifting interferometry. In this paper, a novel optical layout, in combination with instantaneous phase shifting interferometry is described. Experiments were carried out with this setup on a super mirror with a λ/20 surface roughness, to demonstrate the validity of the principle. |
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Keywords: | Phase shifting Surface profile measurement Flat surfaces Instantaneous phase shifting |
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