Resonant CO2 laser-induced breakdown in polyatomic molecules |
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Authors: | R. Fantoni E. Borsella L. Caneve S. Piccirillo |
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Affiliation: | (1) ENEA, Dip. TIB, U.S. Fisica Applicata, CRE Frascati, C.P. 65-00044, Frascati(Roma), Italia |
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Abstract: | Summary The onset of CO2 laser-induced breakdown has been observed by irradiating several polyatomic species (SiH4, NH3, hydrocarbons, fluorohydrocarbons) at a wavelength resonant with an IR active vibration. Primary fragmentation and subsequent ion and radical secondary reactions have been monitored detecting the spontaneous luminescence with a gateable optical multichannel analyser. The resonant laser-induced processes can be of importance in etching reactors where hydrocarbons and fluoro-hydrocarbons are commonly used, as well as in laser chemical vapour deposition reactors for the production of sinterable Si3N4 and SiC powders. |
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Keywords: | Autoionization photoionization photodetachment |
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