| 基于光子晶体分光的气敏传感器研究 |
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| 引用本文： | 孔延梅,高超群,景玉鹏,陈大鹏.基于光子晶体分光的气敏传感器研究[J].物理学报,2011,60(5):54215-054215. |
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| 作者姓名： | 孔延梅 高超群 景玉鹏 陈大鹏 |
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| 作者单位： | 中国科学院微电子研究所集成电路先导工艺研发中心,微电子器件与集成技术重点实验室,北京 100029 |
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| 摘 要： | 本文利用微机电系统技术实现气敏传感器的主要思想,设计了基于超棱镜效应的光子晶体分光系统,它能够实现高精度的分光,使得光谱仪的分辨率有很大程度的提高,并且为应用于许多光学系统的新型分光元件的研究提供新的思路和基础.
关键词：
气敏传感器
光子晶体
超棱镜
负折射
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| 关 键 词： | 气敏传感器 光子晶体 超棱镜 负折射 |
| 收稿时间： | 7/8/2010 12:00:00 AM |
The research of the air-sensitive sensor based on the photonic crystal beam splitter |
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| Kong Yan-Mei,Gao Chao-Qun,Jing Yu-Peng,Chen Da-Peng.The research of the air-sensitive sensor based on the photonic crystal beam splitter[J].Acta Physica Sinica,2011,60(5):54215-054215. |
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| Authors: | Kong Yan-Mei Gao Chao-Qun Jing Yu-Peng Chen Da-Peng |
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| Institution: | Integrated Circuit Advanced Process Center, Key Lab of Microelectronics Device and Integration Technology,Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;Integrated Circuit Advanced Process Center, Key Lab of Microelectronics Device and Integration Technology,Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;Integrated Circuit Advanced Process Center, Key Lab of Microelectronics Device and Integration Technology,Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;Integrated Circuit Advanced Process Center, Key Lab of Microelectronics Device and Integration Technology,Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China |
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| Abstract: | The spectroscopy is the ultimate way for chemical analysis. This paper mainly describes the idea of an air-sensitive sensor based on MEMS technology, and more over, a photonic crystal (PC) beam splitter was designed, which can achieve high resolution beam steering, and this improves the resolution of the sensor. The paper offers a new idea and lays the foundation for the novel beam splitter that applied to many optical systems. |
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| Keywords: | air-sensitive sensor photonic crystal (PC) superprism negative refraction |
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