带有实时温度补偿功能的微型光谱仪研制

解调飞机上变栅距光栅位移传感器的微型光谱仪在受到严重的高低温冲击后会出现温度漂移。针对航空领域中变栅距光栅位移传感器的解调系统研制了一种具有实时温度补偿功能的微型光纤光谱仪。为了实现实时温度补偿，分析了温度变化对微型光谱仪的影响，并对传统的交叉式Czerny-Turner光路进行了优化，用ZEMAX软件模拟得到：在相同的受热产生的变形条件下，优化的C-T光路光谱漂移量相比优化前的更小且整体漂移线性度更好。在此基础上提出了一种引入参考光来实现实时温度补偿的方法，并最终基于改进的C-T光路制作了一个体积为80 mm×70 mm×70 mm、工作波段在500～1 000 nm、积分时间为8 ms～1 000 ms、光学分辨率约为2 nm的微型光纤光谱仪，用实验验证了优化的C-T光路的光谱温度漂移情况及温度补偿方案的可行性。实验结果表明在近60 ℃范围内的温度冲击下，研制的微型光谱仪能够达到波长标准误差小于0.1 nm，波长最大误差小于传感器系统所要求的0.3 nm，满足初始的设计要求。该微型光谱仪的创新之处在于采用了优化的交叉式C-T光路作为色散系统且基于引入参考光的方法实现了实时温度补偿功能。

Development of Micro-Spectrometer with a Function of Timely Temperature Compensation

Temperature drift will be brought to Micro-Spectrometer used for demodulating the Varied Line-Space(VLS) grating position sensor on aircraft due to high-low temperature shock. We successfully made a Micro-Spectrometer, for the VLS grating position sensor on aircraft,which still have stable output under temperature shock enviro nment. In order to present a real time temperature compensation scheme, the effects temperature change has on Micro-Spectrometer are analyzed and the traditional cross Czerny-Turner(C-T)optical structure is optimized. Both optical structures are analyzed by optics design software ZEMAX and proved that comparedwithtraditional cross C-T optical structure, the newone can accomplish not only smaller spectrum drift but also spectrum drift with better linearity. Based on the new optical structure. The scheme of using reference wavelength to accomplish real time temperature compensation was proposed and a Micro-fiber Spectrometer was successfully manufactured, whith is with Volume of 80 mm×70 mm×70 mm, integration time of 8～1 000 ms and FullWidthHalfMaximum(FWHM) of 2 nm. Experiments show that the new spectrometer meets the design requirement. Under high temperature in the range of nearly 60 ℃, the standard error of wavelength of this new spectrometer is smaller than 0.1 nm, and the maximum error of wavelength is 0.14 nm, which is much smaller than required 0.3 nm. Innovations of this paper are the schemeof real time temperature compensation, the new cross C-T optical structure and a Micro-fiber Spectrometer based on it.