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n型和p型4H-SiC的二级喇曼谱
引用本文:高欣,孙国胜,李晋闽,王雷,赵万顺,张永新,曾一平.n型和p型4H-SiC的二级喇曼谱[J].半导体学报,2004,25(12):1555-1560.
作者姓名:高欣  孙国胜  李晋闽  王雷  赵万顺  张永新  曾一平
作者单位:中国科学院半导体研究所新材料实验室 北京100083 (高欣,孙国胜,李晋闽,王雷,赵万顺),兰州大学物理学院 兰州730000 (张永新),中国科学院半导体研究所新材料实验室 北京100083(曾一平)
摘    要:给出了n型和p型4H-SiC的二级喇曼谱的实验结果.指认了所观察到的一些光谱结构对应的特定声子支及其在布里渊区中相应的对称点.发现在4H-SiC的二级喇曼谱中存在能量差约为10cm-1的双谱线结构,这一结构与六方相GaN,ZnO和AlN的双谱线结构具有相同的能量差.二级喇曼谱的截止频率对于不同掺杂情况的4H-SiC具有相同的值.它并不等于n型掺杂4H-SiC的A1(LO)声子的倍频,而是等于未掺杂样品的A1(LO)声子的倍频.掺杂类型和杂质浓度对4H-SiC的二级喇曼谱几乎没有影响.

关 键 词:4H-SiC    二级喇曼谱    截止频率

Second-Order Raman Scattering from n- and p-Type 4H-SiC
Gao Xin,SUN Guosheng,Li Jinmin,Wang Lei,Zhao Wanshun,ZHANG Yongxin,Zeng Yiping.Second-Order Raman Scattering from n- and p-Type 4H-SiC[J].Chinese Journal of Semiconductors,2004,25(12):1555-1560.
Authors:Gao Xin  SUN Guosheng  Li Jinmin  Wang Lei  Zhao Wanshun  ZHANG Yongxin  Zeng Yiping
Abstract:The results of second-order Raman-scattering experiments on n- and p-type 4H-SiC are presented,covering the acoustic and the optical overtone spectral regions.Some of the observed structures in the spectra are assigned to particular phonon branches and the points in the Brillouin zone from which the scattering originates.There exists a doublet at 626/636cm -1 with energy difference about 10cm -1 in both n- and p-type 4H-SiC,which is similar to the doublet structure with the same energy difference founded in hexagonal GaN,ZnO, and AlN.The cutoff frequency at 1926cm -1 of the second-order Raman is not the overtone of the A 1(LO) peak of the n-type doping 4H-SiC,but that of the undoping one.The second-order Raman spectrum of 4H-SiC can hardly be affected by doping species or doping density.
Keywords:H-SiC  second-order Raman  cutoff frequency
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