Deuterium depth distribution study in Yb

The deuterium depth distribution for a 20 keV/D D_3~+beam implanted into ytterbium(Yb) at a temperature between 300 and 340 K was studied using the D(d,p)T reaction.By analyzing the proton yields,the deuterium depth distribution from the front surface to 500 nm depth was found.The results indicate that an equilibrium deuterium distribution region from the front surface to a depth approximately equal to the mean range of implanted deuterons was formed in Yb during the implantation.The deduced deuterium concentration in the equilibrium deuterium distribution region was D/Yb = 22%.