| 斜角入射沉积法制备渐变折射率薄膜的折射率分析 |
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| 引用本文： | 沈自才,孔伟金,刘世杰,沈建,邵建达,范正修. 斜角入射沉积法制备渐变折射率薄膜的折射率分析[J]. 物理学报, 2006, 55(10): 5157-5160 |
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| 作者姓名： | 沈自才 孔伟金 刘世杰 沈建 邵建达 范正修 |
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| 作者单位： | (1)中国科学院上海光学精密机械研究所,上海 201800; (2)中国科学院上海光学精密机械研究所,上海 201800;中国科学院研究生院,北京 100039 |
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| 摘 要： | 斜角入射沉积法是一种制备薄膜的新颖方法,它可以用来制备渐变折射率薄膜.本文首先探讨了膜料的沉积入射角为α,薄膜柱状生长倾斜角为β时的薄膜的填充系数;之后利用drude理论,分析研究了斜角入射沉积法制备渐变折射率薄膜的折射率与薄膜的入射角和生长方向的关系.关键词：斜角入射沉积渐变折射率填充系数
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| 关 键 词： | 斜角入射沉积 渐变折射率 填充系数 |
| 收稿时间： | 2005-10-26 |
| 修稿时间： | 2005-10-262006-01-18 |
Refractive index analysis of graded index coatings prepared by glancing angle deposition |
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| Shen Zi-Cai,Kong Wei-Jin,Liu Shi-Jie,Shen Jian,Shao Jian-Da,Fan Zheng-Xiu. Refractive index analysis of graded index coatings prepared by glancing angle deposition[J]. Acta Physica Sinica, 2006, 55(10): 5157-5160 |
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| Authors: | Shen Zi-Cai Kong Wei-Jin Liu Shi-Jie Shen Jian Shao Jian-Da Fan Zheng-Xiu |
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| Affiliation: | 1 Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China; 2 Graduate School of the Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | Glancing angle deposition is a novel method for the preparation of coatings, it can be used to prepare graded index coatings. In this paper, the packing factor of the coatings prepared by glancing angle deposition is analyzed under the conditions that the flux arrival angle of coating material is α and the columnar microstructure inclination angle of coatings is β. And then the relation between the refractive index of the coatings, the flux arrival angle and the columnar inclination angle is discussed based on Drude theory. |
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| Keywords: | glancing angle deposition graded index packing factor |
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