| 原子氧对非平衡磁控溅射MoS2-Ti复合薄膜真空摩擦学性能的影响 |
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| 引用本文： | 胡汉军,张凯锋,周晖,刘兴光,郑玉刚. 原子氧对非平衡磁控溅射MoS2-Ti复合薄膜真空摩擦学性能的影响[J]. 摩擦学学报, 2021, 41(5): 627-635. DOI: 10.16078/j.tribology.2020240 |
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| 作者姓名： | 胡汉军 张凯锋 周晖 刘兴光 郑玉刚 |
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| 作者单位： | 兰州空间技术物理研究所 真空技术与物理国防科技重点实验室, 甘肃 兰州 730000 |
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| 基金项目： | 装备预研领域基金项目(61409220205)资助 |
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| 摘 要： | 对采用非平衡磁控溅射方法制备的柱状晶MoS2-Ti复合薄膜开展了原子氧(AO)辐照试验. 原子氧的平均动能是5 eV，累计辐照通量6.0×1022 atoms/cm2. 原子氧造成薄膜表面出现“绒毯”状形貌，表层的MoS2和内部的低价钛氧化物分别被氧化成硬质的MoO3和TiO2，但原子氧对距表层30 nm以下Mo的化学态没有影响. 薄膜的初始真空摩擦系数和磨损率分别由辐照前的大约0.018和4.49 × 10?17 m3/(N·m)升高至0.03 和5.5×10?17 m3/(N·m)，磨损机制也发生了由黏着磨损向磨粒磨损的转变.
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| 关 键 词： | MoS2-Ti薄膜 原子氧辐照 真空 化学组成 摩擦机制 |
| 收稿时间： | 2020-11-01 |
Influence of Atomic Oxygen on the Vacuum Tribological Performance of MoS2-Ti Composite Films Deposited by Unbalanced Magnetron Sputtering |
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| Affiliation: | National Key Laboratory of Science and Technology on Vacuμm Technology and Physics, Lanzhou Institute of Physics, CAST, Gansu Lanzhou 730000, China |
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| Abstract: | MoS2-Ti composite film with columnar microstructure was fabricated by unbalanced magnetron sputtering, and was irradiated by an atomic oxygen (AO) beam with 5eV kinetic energy and total fluence of 6.0×1022 atoms/cm2. The MoS2-Ti composite film exhibited a “blanket-like” surface morphology after AO irradiation. The MoS2 phase on the film surface (within the depth of ~30 nm) and titanium suboxides (e.g. TiO2-x, where 03 and TiO2, respectively, leaving the MoS2 beneath the top 30 nm oxidation layer uninfluenced were oxidized to MoO3 and TiO2, leaving unchanged chemical state of element Mo in the film. After AO irradiation, initial friction coefficient and wear rate increased from 0.018 to 0.03 and 4.49 × 10?17 m3/(N·m) to 5.5 × 10?17 m3/(N·m), respectively, and its friction mechanism was transformed from adhesion to abrasion. |
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