Floating-patch MEMS antennas on HRS substrate for millimetre-wave applications |
| |
Authors: | Cho Y.H. Ha M.-L. Choi W. Pyo C. Kwon Y.-S. |
| |
Affiliation: | Sch. of Inf. & Commun. Eng., Mokwon Univ., Daejeon, South Korea; |
| |
Abstract: | Novel floating-patch micro-electro-mechanical system (MEMS) antennas are proposed for millimetre-wave applications. The floating-patch MEMS antennas are fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented. |
| |
Keywords: | |
|
|