| 高温超导红外探测器的电极工艺探讨 |
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| 引用本文： | 黄江平,李国桢.高温超导红外探测器的电极工艺探讨[J].红外技术,1995,17(6):4-7. |
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| 作者姓名： | 黄江平 李国桢 |
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| 作者单位： | 昆明物理研究所 |
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| 摘 要： | 介绍了高温超导红外探测器电极材料的选择和制备。选用先蒸、后蒸金，再合金化的电极工艺。芯片装配成器件后，器件性能稳定，膜层牢固，接触电阻小。
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| 关 键 词： | 高温超导 红外探测器 电极 |
On the Electrode Technology of High T_c Superconducting Detector |
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| Huang Jiangping, Li Guochen, Zeng Qunde ,Lu Junjie, Li Dan, Huang Zongtan, Dong klanqing.On the Electrode Technology of High T_c Superconducting Detector[J].Infrared Technology,1995,17(6):4-7. |
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| Authors: | Huang Jiangping Li Guochen Zeng Qunde Lu Junjie Li Dan Huang Zongtan Dong klanqing |
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| Abstract: | The material selection and manufacturing process for the preparation of electrodes in high Tc Superconductive IR detectors are reported, including the evaporation of silver, gold and then alloying. The devices thus made have a good and stable performance. |
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| Keywords: | High T_c superconductive detector Electrode |
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