nc-TiC/a-C纳米复合多层薄膜的制备及其摩擦学性能的研究

采用磁过滤阴极弧等离子体沉积技术,在单晶硅片上制备了不同亚层厚度和亚层弹性模量匹配的nc-Ti C/a-C纳米复合多层薄膜,采用X射线粉末衍射仪、扫描电子显微镜和透射电子显微镜对其微观结构进行表征,利用激光扫描仪对其内部应力进行测试,采用微摩擦磨损试验机表征薄膜的摩擦磨损性能,以考察多层结构设计对于薄膜机械性能的影响.结果表明:多层薄膜相对于单层薄膜可以有效降低膜层内应力,同时薄膜的减摩抗磨性能也得到了提高.亚层厚度为40 nm和相邻亚层弹性模量差距较小的nc-Ti C/a-C纳米复合多层薄膜的抗磨性能最佳.

The Preparation and Tribological Properties of nc-TiC/a-C Nanocomposite Multilayer Films

nc-TiC/a-C nanocomposite multilayer films with different sub-layer thickness and sub-layer modulus ratio were deposited on single crystal silicon wafers by filtered cathodic arc (FCA) technique. X-ray diffraction,scanning electron microscope and transmission electron microscope was used to analysis the film's microstructure. Laser scanner was used to determine the intrinsic film stress. The tribological properties of the films were evaluated using a micro tribometer in order to study the effect of multilayer structure design on their friction-reducing and anti-wear performance. The results indicate that compared with monolayer film,multilayer films had lower intrinsic stress and better friction-reducing and anti-wear performance. When the sub-layer thickness was 40 nm and sub-layer modulus ratio was the smallest,the films had the best wear resistance.